Photo by Yuzo FUKUZAKI

IEEE International Conference on Microelectronic Test Structures

ICMTS 2023

Registration

At a Glance

Call for Papers (PDF)  image

Tutorials

Program

Program Booklet (PDF)  image

Chairman’s Letter

On behalf of the steering and technical program committees, I take pleasure in welcoming you to the 2023 International Conference on Microelectronic Test Structures (ICMTS 2023) at the University of Tokyo in Tokyo, Japan on March 27-March 30, 2023. It is the 35th ICMTS as an international conference and the first in-person ICMTS after the remote ICMTS 2021 and ICMTS 2022 due to COVID-19. The in-person style is much-awaited for many ICMTS lovers since the conference’s purpose is to bring together designers and users of test structures to discuss recent development and future directions.

In the past, many topics of the ICMTS were so-called advanced logic or memory technologies related. Many ideas for new test structures and new results were proposed and discussed in the ICMTS for the technologies. I think it was meeting the needs of the times. However, as the semiconductor role is becoming more important and is becoming more diversified, many researchers, engineers, and students have selected different topics for their research. As a result of the changes, topics of the ICMTS have become diversified. Topics of the ICMTS 2023 are the result of the changes and are meeting the needs of the time.

The technical program is scheduled to be held from March 28 to March 30 and consists of nine sessions containing thirty-six contributed papers. The nine sessions cover emerging memory, noise, power devices, measurement technique, matching & variability, yield and device optimization, MEMS & sensors, modeling, and novel materials. In addition to the thirty-six papers, two bonus presentations will be provided on March 29 for young researchers that have not familiar with making better papers and presentations.

On March 27, the conference is preceded by a one-day tutorial short course providing seven topics by a leading expert in each field, which many people are interested in. Two topics cover an introduction to test structure design, measurement, and analysis. The five topics cover the latest update in each field that includes advanced CMOS, Gallium oxide for power devices, CMOS image sensors, 2D/3D Flash memory, and MEMS. The tutorial course will be the best place for many attendees to learn fundamentals on test structures and to catch up on advanced topics in the field.

Tokyo is an endlessly interesting city for everyone. There are many historical places to watch, many artistic places to feel something, many modern and traditional places to find something different from your place, and many places to enjoy eating. Since The University of Tokyo is located in the center of Tokyo, you can easily access the interested places quickly and easily. In addition to the places, the week of the ICMTS 2023 is the typical week that you can enjoy seeing the cherry trees in full bloom.

I look forward to seeing you at the ICMTS 2023 in Tokyo.

Sincerely,

Satoshi Habu General Chairman


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